White Papers

A novel sensor solution for e-cigarettes enables smaller and less expensive MEMS sensors to now be used without false triggers

This paper explains the problems of false triggers that happen when smaller and less expensive MEMS sensors are used to replace the usual ECM sensors that detect when the user has inhaled on an e-cigarette and activate the heating element. Until now, the cause of these false triggers has been elusive. Nanusens has discovered that the smaller air passageways of MEMS-based designs clog with oils that result in potentially dangerous false triggers. Nanusens’ patented solution is explained that uses averaging algorithms on the data from an absolute pressure MEMS sensor in the e-cig and accurately identifies when the user inhales and thus prevents these false triggers.

The challenges and solutions of building MEMS devices using the BEOL metal layers of a solid-state CMOS semiconductor process

This paper covers the problems faced by current production methods for MEMS sensors, in particular the difficulty of ramping up production to meet the ever-increasing demand for sensors. It then discusses the challenges of the solution of building MEMS using only standard CMOS processes in a fab and how they have been solved by Nanusens using techniques that are now patent pending. The focus of this paper is on linear inertial sensors as a worked example of how these techniques can be used. Further papers will explore their use for other types of sensors that can also be built using CMOS and, crucially, simultaneously on the same die at the same time.

Headquarters UK
EPIC Centre
White Rock Business Park
Waddeton Close
Paignton, Devon TQ4 7RZ
Phone: +44 1803 714720

Nanusens Spain
Av. del Parc Tecnològic, 3 CENT
Parc Tecnològic del Vallès
08290 Cerdanyola del Vallès Spain
Phone: +34 935 824 466

Media contact
Nigel Robson, Vortex PR.
Phone: +44 1481 233080